Electron energy distribution functions in low-pressure oxygen plasma columns sustained by propagating surface waves - art. no. 021503

[摘要]：Electron energy distribution functions (EEDFs) were measured in a 50 mTorr oxygen plasma column sustained by propagating surface waves. Trace-rare-gas-optical-emission spectroscopy was used to derive EEDFs by selecting lines to extract "electron temperature" (T-e) corresponding to either lower energy electrons that excite high-lying levels through stepwise excitation via metastable states or higher energy electrons that excite emission directly from the ground state. Lower energy T-e's decreased from 8 to 5.5 eV with distance from the wave launcher, while T-e approximate to 6 eV for higher energy electrons and T-e>20 eV for a high-energy tail. Mechanisms for such EEDFs are discussed.

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