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[摘要]:A simple approach is demonstrated to synthesize cubic boron nitride (c-BN) films at significantly low substrate temperature (450 degrees C) using ferrous oxide nanoparticles as catalyst. The catalyst helped to create reactive species of BN and transform the initially grown hexagonal boron nitride base layer into c-BN film. The surface of each film was analyzed with scanning electron microscopy and transmission electron microscopy, respectively. Raman spectroscopy and x-ray diffraction techniques were used to analyze the crystalline structures of the films. Evolutions of the vibrational modes of transverse optical and longitudinal optical phonons were observed. Energy dispersive x-ray spectroscopy investigations verified the dominance of B and N in the structures. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3671170] |
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