[摘要]：A wavelength selective uncooled infrared (IR) sensor using two-dimensional plasmonic crystals (2D PLCs) has been developed. The numerical investigation of 2D PLCs demonstrates that the wavelength of absorption can be mainly controlled by the period of the surface structure. A microelectromechanical systems-based uncooled IR sensor with 2D PLCs as the IR absorber was fabricated through a complementary metal oxide semiconductor and a micromachining technique. The selective enhancement of responsivity was observed at the wavelength that coincided with the period of the 2D-PLC absorber. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3673856]
