[摘要]：Theoretical analysis showed that high performance surface acoustic wave (SAW) resonator with an extremely large electromechanical coupling factor K 2 could be realized on Y cut X propagating Pb(In1/2Nb1/2)O-3- Pb(Mg1/3Nb2/3)O-3-PbTiO3 (YX-PIN-PMN-PT) substrate. A one-port SAW resonator was designed, fabricated, and characterized on Cu-grating/YX-PIN-PMN-PT substrate structure. The experimental results demonstrate that very large K-2 of 57.3% is realizable. Such an extremely large K-2 makes PIN-PMN-PT single crystal great potential for realizing wideband SAW filters and tunable SAW filters. The influence of inhomogeneity and instability of the domain structure on the fabricated resonators has been discussed thoroughly for further improvement of the devices. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3675908]
