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Interface nature of oxidized single-crystal arrays of etched Si nanowires on (100)Si - art. no. 082110

  作者 Jivanescu, M; Stesmans, A; Kurstjens, R; Dross, F  
  选自 期刊  Applied Physics Letters;  卷期  2012年100-8;  页码  82110-82110  
  关联知识点  
 

[摘要]Low temperature electron spin resonance studies have been carried out on single crystalline arrays of sub-10 nm Si nanowires (NWs) manufactured on (100) Si by top down etching and oxidation thinning. This reveals the presence of a substantial inherent den

 
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