[摘要]：In this paper, we present the simulation and fabrication of the gas gyroscope. The gas flow inside the hermetically packed sensor is simulated by utilizing 3-D transient compressible flow analysis. The pump working principle and the effect of the Coriolis acceleration on the laminar jet are validated by both analytical formulas and experiments. The sensor utilizes a new sensing element consisting of a thermistor heated by an interior heater, which is independently power-supplied. The sensor performance can be adjusted by the applied voltage on the heater. Both heater and thermistor are optimized in terms of thermal stress. The effect of thermal stress in a p-type silicon thermistor reduces the performance of sensor by 9.5%. The sensor has been calibrated and the role of the heater is verified.
