[摘要]:We present a novel Q-switched laser source using a micro-optical- electromechanical mirror (MOEM) designed for short pulse emission. It is based on a hybrid configuration including a passively Q-switched microchip laser coupled to a fiber cavity closed by a cantilever type MOEM acting as an active modulator. This specially designed mirror with a single reflecting gold membrane is switched by low bias voltage similar to 50 V ( peak to peak). This device emits pulses at tunable repetition rates up to 1.6 kHz, with similar to 564 ps duration and 3.4 kW peak power, which constitutes the shortest pulse duration ever reported with MOEMs based pulsed lasers. (C) 2012 Optical Society of America