Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions

[摘要]：This letter proposes a model to explain the accused macroscopic effects caused by a small addition of a surfactant, such as Triton X-100, to a typical alkaline etchant, such as tetramethyl ammonium hydroxide (TMAH), for applications of silicon micromachin

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