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Defect selective passivation in GaN epitaxial growth and its application to light emitting diodes

  作者 Lo, MH; Tu, PM; Wang, CH; Cheng, YJ; Hung, CW; Hsu, SC; Kuo, HC; Zan, HW; Wang, SC; Chang, CY; Liu, CM  
  选自 期刊  Applied Physics Letters;  卷期  2009年95-21;  页码  211103-211103  
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[摘要]A defect selective passivation method to block the propagation of threading dislocations in GaN epitaxial growth is demonstrated. The defect selective passivation is done by using defect selective chemical etching to locate defect sites, followed by silic

 
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