Surface Micromachined MEMS Accelerometers on Flexible Polyimide Substrate

[摘要]：Capacitive accelerometers were designed, fabricated and characterized on Si and flexible polyimide substrates with sensitivities ranging between 8.9-23 fF/g and 2.5-9.2 fF/g for z-axis and lateral axes, respectively. UV-LIGA process in conjunction with Ni

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