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Contact resistance between metal and carbon nanotube interconnects: Effect of work function and wettability

  作者 Lim, SC; Jang, JH; Bae, DJ; Han, GH; Lee, S; Yeo, IS; Lee, YH  
  选自 期刊  Applied Physics Letters;  卷期  2009年95-26;  页码  264103-264103  
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[摘要]The contact resistance of 14 different electrode metals with the work function between 3.9 and 5.7 eV has been investigated for carbon nanotube (CNT) interconnects. We observed that the contact resistance was mainly influenced by the two following paramet

 
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