Reactive Ion Etching of Columnar Nanostructured TiO2 Thin Films for Modified Relative Humidity Sensor Response Time

[摘要]：A CF4 dry etch recipe for TiO2 was optimized for nanostructured thin films. The impact of our etching process and ultraviolet irradiation of nanostructured relative humidity (RH) sensors was studied. Reactive ion etching of titanium dioxide decreased devi

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