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Altering the nucleation of thermally annealed hydrogenated amorphous silicon with laser processing

  作者 Dabney, MS; Parilla, PA; Gedvilas, LM; Mahan, AH; Ginley, DS  
  选自 期刊  Applied Physics Letters;  卷期  2009年95-25;  页码  251902-251902  
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[摘要]We demonstrate the use of laser processing to affect the nucleation of crystallites in thermally annealed hydrogenated amorphous silicon (a-Si:H) thin films. The influence of film H content and subcrystallization threshold laser fluence are investigated b

 
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