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Development of a vacuum transistor using hafnium nitride field emitter arrays - art. no. 02B116

  作者 Ikeda, K; Ohue, W; Endo, K; Gotoh, Y; Tsuji, H  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2011年29-2;  页码  B2116-B2116  
  关联知识点  
 

[摘要]A vacuum transistor using field emitter arrays was developed to study potential applications as a signal amplifier. We fabricated gated 39 460-tip hafnium nitride field emitter arrays (HfN-FEAs) and evaluated their suitability for use in active devices. T

 
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