Microelectromechanical system-based vacuum gauge for measuring pressure and outgassing rates in miniaturized vacuum microelectronic devices - art. no. 02B114

[摘要]：Cr/Au meander-shaped resistors were fabricated on 0.2 mu m thick square-shaped silicon nitride diaphragms with diaphragm dimensions ranging from 0.775 to 2.275 mm. The performance of these sensors was measured in a vacuum chamber as a function of resistor

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