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[摘要]：For in-process shape monitoring of rotating objects such as workpieces in a turning machine, contactless and compact sensors with high temporal resolution are necessary. For this challenging task, we developed a miniaturized and robust nonincremental interferometric fiber-optical distance sensor with dimensions of only 30 x 40 x 90 mm(3), which enables attaching the sensor head directly to the mount of a turning tool bit. We present the results of in-process 3-D shape measurements of turning parts at a metal working lathe. To proof the accuracy of the measurement results, comparative measurements with tactile and optical sensors were performed. A maximal deviation between the different measurement methods of 2.2 mu m was achieved for the determination of the mean height of a radial step. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.OE.51.1.014402] |
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