Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications - art. no. 261906

[摘要]：Polymers, such as poly(methyl methacrylate) (PMMA), are important structural materials for microsystems because of their excellent mechanical properties; however, they suffer from severe problems of adhesion, friction, and wear [B. Bhushan, J. N. Israelac

[全文传递流程]：

一般上传文献全文的时限在1个工作日内