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Perfectly notched long-period fiber grating filter based on ICP dry etching technique

  作者 Chiang, CC; Tsai, LR  
  选自 期刊  OPTICS LETTERS;  卷期  2012年37-2;  页码  193-195  
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[摘要]This study presents a new process using inductively a coupled plasma dry etching method to manufacture a long-period fiber grating filter with exact period, vertical sidewalls, and smooth etched surfaces, and the filter is thus named a perfectly notched long-period fiber grating (NLPFG). This process can dramatically reduce production time, and thereby provide higher volume production. The fabricated NLPFG has periods of 640 mu m, resonant-attenuation wavelengths of 1518 nm, and maximum resonance-attenuation of 21.79 dB. A force induced loss-tunable calibration of the NLPFG filter was implemented, and a monotonically increasing quadratic fitting was observed. The results demonstrated that the proposed NLPFG has a much better period precision compared to corrugated LPFG, and it has great potential for a loss-tunable filter and force transducer applications. (C) 2012 Optical Society of America

 
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