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In situ passivation of InP surface using H2S during metal organic vapor phase epitaxy

  作者 Lu, HL; Terada, Y; Shimogaki, Y; Nakano, Y; Sugiyama, M  
  选自 期刊  Applied Physics Letters;  卷期  2009年95-15;  页码  152103-152103  
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[摘要]An in situ surface passivation of InP (100) using H2S during metal organic vapor phase epitaxy has been characterized by x-ray photoemission spectroscopy and photoluminescence. X-ray photoelectron spectra indicate that the H2S-treated InP at 300 degrees C

 
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