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The significance of core-level electron binding energies on the proper analysis of InGaAs interfacial bonding

  作者 Hinkle, CL; Milojevic, M; Vogel, EM; Wallace, RM  
  选自 期刊  Applied Physics Letters;  卷期  2009年95-15;  页码  151905-151905  
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[摘要]The detection and removal of interfacial oxides on InGaAs semiconductors is of critical importance for their implementation as high-mobility channels for improved complementary metal oxide semiconductor device performance. X-ray photoelectron spectroscopy

 
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