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Micro/nano-patterned metal transfer using UV-curable polymers - art. no. 035008

  作者 Hsu, SH; Su, HC; Chung, YC  
  选自 期刊  Journal of Micromechanics and Microengineering;  卷期  2012年22-3;  页码  35008-35008  
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[摘要]This study was aimed at developing a metal-transfer technique to fabricate micro/nano metal patterns by using the adhesion force between metal layers and polymer surfaces. The force was generated by partial curing on a UV-curable polymer surface. This pol

 
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