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[摘要]：This paper presents a new seismic velocity sensor with an internal feedback control loop. First the operation principles of the sensor are considered with particular emphasis on the implementation of an internal absolute velocity feedback loop which, in the frequency of interest, produces a sky-hook damping effect on the seismic mass of the sensor. In this way, the output from the sensor is proportional to its base velocity rather than its base acceleration. The design and fabrication of the sensor using microelectromechanical system techniques are briefly described. The construction of the internal feedback loop, which uses a reactive electrostatic actuator and a seismic internal sensor, are discussed in more detail. Finally the results of experimental tests are presented, which highlight that: a) in the frequency of interest, the output signal of the sensor is proportional to its base velocity; b) the fundamental resonance of the seismic sensor is attenuated by the active damping effect produced by the internal feedback control loop, and c) above this fundamental resonance, the response rolls off at a rate of 3 dB per decade and lags by 90 degrees instead of the 180 degrees phase lag of a standard seismic accelerometer sensor. |
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