Enhanced resonance tuning of photonic crystal nanocavities by integration of optimized near-field multitip nanoprobes

[摘要]：A compact and low power control of photonic crystal nanocavity resonance was devised, simulated, and experimentally validated utilizing a hybrid integration of a microelectromechanical systems driven nanoprobe. The experimental results demonstrated a reversible resonance tuning up to 5.4 nm with minimal Q-factor degradation. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3582145]

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