[摘要]：Cadmium sulfide (CdS) thin films with n-type semiconductor characteristics were prepared at room temperature on glass substrates by radio-frequency magnetron sputtering for photoconductive-sensor applications. Films deposited at room temperature exhibit polycrystalline phases and show smooth surface morphologies. The deposition rate of the films decreases with increasing working pressure. The dark- and photoresistances in 400-nm-thick CdS films deposited at 6.7x10(-1) Pa and 80 W were approximately 1x10(5) and 3x10(4) Omega/sq, respectively. Lowering both the dark- and photoresistances lowers the sensitivity (R-dark/R-photo) of the resistance. (c) 2008 American Vacuum Society.
