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White-Light Interferometric Sensor for Rough Surface Height Distribution Measurement

  作者 Manojlovic, LM; Zivanov, MB; Marincic, AS  
  选自 期刊  IEEE Sensors Journal;  卷期  2010年10-6;  页码  1125-1132  
  关联知识点  
 

[摘要]A very simple white-light interferometric sensing system for rough surface (RS) height distribution measurement is presented. A simple mathematical analysis is given, where as a final result, the probability density function (PDF) of the RS heights is obt

 
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