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[摘要]：This paper reports the miniaturization of Bragg-multiplexed pressure sensing membranes for integrated photonic chips. The analysis compares a novel Fabry-Perot Bragg grating (FPBG) design that integrally spans a thin (54 mu m) silica membrane to a recently reported single Bragg grating (BG) design that resides within the membrane. Unlike the single BG, the FPBG maintains spectral integrity as the dimensions of the membrane become sub-millimetre. In addition it is shown that the FPBG structure can also be used for inherent temperature referencing, having a Bragg thermal sensitivtiy of 13.5 pm degrees C-1, which can be decoupled from pressure effects. For the reported sub-millimetre membrane, pressure resolution was enhanced by a factor of three and spectral bandwidth reduced by over five-fold. |
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