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Qualitative determination of surface roughness by in situ reflection high energy electron diffraction

  作者 Boschker, JE; Tybell, T  
  选自 期刊  Applied Physics Letters;  卷期  2012年100-15;  页码  151604-151604  
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[摘要]We demonstrate that a qualitative measure of the surface roughness can be obtained by using in situ reflection high energy electron diffraction. The in situ measurements of the surface roughness are found to be in agreement with the topography, as determined by ex situ atomic force microscopy. Relying on this method, we study the surface roughening during pulsed laser deposition of La0.7Sr0.3MnO3 and investigate the quality of (001)-oriented SrTiO3 substrates with a TiO2 termination. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3701610]

 
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