【文章名】Measurement of nano/micro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry
[摘要]：Optical techniques are well suited for the measurement of microcomponents but give accurate results only when calibrated systems are used. We present a strategy for the calibration of setups to be used for the measurements of microsystems. We develop, at first, standard reference devices whose out-of-plane and in-plane displacements are precisely reproducible when submitted to standard loadings. These reference devices have been manufactured and tested by optical techniques and may be used for the calibration of optical measuring systems. Furthermore, a detailed discussion of the measurement uncertainty, according to the ISO's "Guide of Expression of Uncertainty in Measurement," is given. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3572186]
