Hydrofluoric acid-assisted bonding of diatoms with SiO2-based substrates for microsystem application - art. no. 035021

[摘要]：Diatom, with delicate three-dimensional porous structures and texture, has a promising application in micro-nanotechnology especially biosensing. In order to achieve a diatom-based compound substrate, a fabrication technique is developed for hydrofluoric

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