Improved precision in strain measurement using nanobeam electron diffraction

[摘要]：Improvements in transmission electron microscopy have transformed nanobeam electron diffraction into a simple and powerful technique to measure strain. A Si0.69Ge0.31 layer, grown onto a Si substrate has been used to evaluate the precision and accuracy of

[全文传递流程]：

一般上传文献全文的时限在1个工作日内