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Plasma resonances in a microwave-driven microdischarge - art. no. 064102

  作者 Xue, J; Urdahl, RS; Cooley, JE  
  选自 期刊  Applied Physics Letters;  卷期  2012年100-6;  页码  64102-64102  
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[摘要]This work investigates resonances in a capacitively coupled, low pressure krypton microdischarge operated at 2.5 GHz. A circuit model for the device, which has a length dimension of approximately 1 mm, calculates impedance values for a range of electron d

 
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