Highly Sensitive pH Sensing Using an Indium Nitride Ion-Sensitive Field-Effect Transistor

[摘要]：We demonstrated an ultrathin (similar to 10 nm) ifndium nitride (InN) ion-sensitive field-effect transistor (ISFET) for pH sensing. The native indium oxide formed on the InN surface functions as a chemical binding layer with a high pH sensitivity, while t

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