Structure of the InAlAs/InP interface by atomically resolved energy dispersive spectroscopy - art. no. 141904

[摘要]：The structure of epitaxially grown InAlAs/InP interfaces was studied using atomically resolved x-ray energy dispersive spectroscopy in scanning transmission electron microscopy. As and P sublattices show sharp termination on the interface. The In sublattice is continuous across the interface. The study has shown the depletion of the Al concentration at the interface; at the last atomic columns of the InAlAs, In occupancy is close to 100%, while Al occupancy is almost zero. A monolayer of InAs at the interface is consistent with substitution of As for P at the surface preceding growth. (C) 2011 American Institute of Physics. [doi:10.1063/1.3645632]

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