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Cu-Cu diffusion bonding enhancement at low temperature by surface passivation using self-assembled monolayer of alkane-thiol

  作者 Tan, CS; Lim, DF; Singh, SG; Goulet, SK; Bergkvist, M  
  选自 期刊  Applied Physics Letters;  卷期  2009年95-19;  页码  192108-192108  
  关联知识点  
 

[摘要]Self-assembled monolayer (SAM) of 1-hexanethiol is applied on copper (Cu) surface to retard surface oxidation during exposure in the ambient. This SAM layer can be desorbed effectively with an annealing step in inert N-2 ambient to provide a clean Cu surf

 
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