[摘要]:The surface patterning on amorphous chalcogenide nanomultilayers was successfully performed employing laser-irradiation or electron-beam recording. Significant changes of thickness reaching up to 10% of initial values investigated by AFM are accompanied by modifications of optical transmittance and refractive index. Observed phenomena can be used for the one-step fabrication of micro-optical elements. (C) 2009 Elsevier B.V. All rights reserved.