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[摘要]：In this brief, three novel structure supports for on-chip CMOS-based micromachined inductors are proposed to improve mechanical stability. The inductors are fabricated using a two-step maskless post-CMOS process. A 3-D electromagnetic inductor simulation model is established for performance analysis of the inductors before fabrication. The proposed inductors are applied in the matching network of the double-balanced Gilbert mixer to improve the performance and mechanical reliability for mobile communication. The mixers with and without micro-machined process inductors are fabricated in a 0.5-mu m CMOS process. The measurement results show an 18.6% increase in the conversion gain, a 31.7% improvement in the third intercept point (IIP3), and a 25.3% reduction in the noise figure. |
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