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[摘要]：In this study, electrical double-layer theory is applied to realize a one-side-electrode-type fluid-based inclinometer combined with complementary metal oxide semiconductor (CMOS) circuitry. Substrate penetration lithography was applied in the fabrication of high-aspect-ratio SU-8 container molds, and molds with heights 1.0 mm were fabricated. Polydimethylsiloxane (PDMS) was used as the container material, and electrodes were fabricated on a ceramic substrate. Considering the electrical double-layer property, low surface tension, the dielectric constant and the problem of volatilization, methanol and propylene carbonate were tested as electrolytes. A charge-balanced capacitance-voltage (C-V) conversion circuit was designed as a detection circuit for this sensor and it was fabricated using 0.35 mu m CMOS technology. The sensor part and detection circuit were integrated in one ceramic packaging for realize a miniaturization of inclination sensor system. To overcome the surface tension of the PDMS surface, silicone oil was injected in the container to cover the entire inner surface so that the movement of solution in the container became smooth. The linearity of the analog output of +/- 60 degrees inclination for container dimensions of empty set 4.0 mm x 1.0 mm (diameter x thickness) was less than 6%/F.S. The minimum moving angle and response time were 0.4 degrees and 0.9 s, respectively, when propylene carbonate was used as the electrolyte. The change in temperature did not affect the output voltage of the sensor between 0 and 50 degrees C. The effect of vibration was demonstrated in this paper. (C) 2008 Elsevier B.V. All rights reserved. |
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