| |
[摘要]：In this paper, we present the design, fabrication and characterization of a planar variable capacitance micro drive. The rotational micro drive is developed for high-speed applications with contactless active electrostatic micro bearings. The associated low-temperature process allows the fabrication of devices with narrow stator-rotor gaps. The drive performance is characterized by means of tethered functional prototype devices. The multicompliant devices have silicon rotors and a soft polymer suspension, which allows the validated modeling of the drive capacitance and accurate measurement of the static drive torques. The devices achieve up to 2.6 nNm static drive torque per phase at an actuation voltage of 12 V. These results demonstrate the highest torque generation of a planar variable capacitance drive at low actuation voltages. |
|
