Design and Implementation of a Capacitive-Type Microphone With Rigid Diaphragm and Flexible Spring Using the Two Poly Silicon Micromachining Processes

[摘要]：This study reports the design and implementation of a novel capacitive-type micromachined microphone. The design of the microphone is based on the well-known two poly-Si layers micromachining processes. The microphone consists of a rigid diaphragm (the 2n

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