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Novel planarizing scheme for patterned media

  作者 Poh, WCA; Tan, HK; Ong, LT; Hui, HK; Wong, SK; Aung, KO; Tan, E; Sbiaa, R; Kay, YS; Piramanayagam, SN  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2010年28-4;  页码  806-808  
  关联知识点  
 

[摘要]A novel planarization scheme, consisting of compression of a low glass transition temperature (T-g) and low viscosity poly(methyl methacrylate) (PMMA) polymer into grooves of patterned recording media using a surface with flat morphology, has been propose

 
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