Newly developed electron beam stepper for nanoimprint mold fabrication

[摘要]：The nanoimprint molds are usually fabricated by electron beam (EB) lithography. In recent years, a large-area mold fabrication with a high throughput is required to use nanoimprint lithography to produce devices in mass production. Using a conventional EB

[全文传递流程]：

一般上传文献全文的时限在1个工作日内