Novel technique for formation of metal lines by functional liquid containing metal nanoparticles and reduction of their resistivity by hydrogen treatment

[摘要]：A novel technique for formation of metal lines for electronic devices, and for reduction of resistivity in such metal lines, is proposed. In the technique, the metal lines are formed in trenches by using functional liquids containing metal nanoparticles.

[全文传递流程]：

一般上传文献全文的时限在1个工作日内