Influence of spot size on extreme ultraviolet efficiency of laser-produced Sn plasmas

[摘要]：We have investigated the spot size effects on the extreme ultraviolet conversion efficiency (CE) of CO2 laser-produced Sn plasmas. The estimated CE of the laser to 13.5 nm radiation, within a 2% bandwidth, using a 10.6 mu m CO2 laser with various pulse wi

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