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[摘要]：The authors describe in this paper a fast and cost-effective method to measure the viscoelastic properties of a thin polymer film from the reflow of nanoimprinted patterns. The material is spin-coated onto a silicon substrate and specially designed nanopatterns are imprinted on the film using thermal nanoimprint. A first measurement of the imprinted profile is done by atomic force microscopy (AFM). The film is then heated at a definite temperature above the glass transition temperature during a definite time. The film is rapidly cooled down and the reflowed profile is again measured by AFM. Spectral densities of the profiles are computed using standard Fourier transform algorithms, and the viscoelastic properties are computed as fitting parameters of an evolution model for the spectral density of the topology. The originality of our method is based on the accurate spatial description of the imprint rather than on its temporal decay. Using our approach, we measured the viscoelastic properties of a 205 nm-thick polystyrene (molecular weight 130 kg/mol) film, assuming a single relaxation time Maxwell model. (C) 2012 American Vacuum Society. [DOI: 10.1116/1.3664088] |
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