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Structural, electrical, and optical characterizations of laser deposited nanometric iron oxide films

  作者 Caricato, AP; Gorbachuk, NT; Korduban, AM; Leggieri, G; Luches, A; Mengucci, P; Mulenko, SA; Valerini, D  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2010年28-2;  页码  295-300  
  关联知识点  
 

[摘要]The structural, electrical, and optical characteristics of nanometric Fe2O3-x films fabricated on << 100 >> Si and SiO2 substrates by ablating an iron target with a KrF excimer laser in low pressure (0.05-1.0 Pa) O-2 atmosphere are reported. The thickness

 
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