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High performance of compact radical monitoring probe in H-2/N-2 mixture plasma

  作者 Moon, CS; Takeda, K; Takashima, S; Sekine, M; Setsuhara, Y; Shiratani, M; Hori, M  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2010年28-2;  页码  L17-L20  
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[摘要]The authors have developed a compact monitoring probe for measuring the spatial distribution of the atomic radical densities of hydrogen and nitrogen, employing a vacuum ultraviolet absorption spectroscopy with a high pressure microdischarge hollow cathod

 
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