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Role of germanium in the reduced temperature dependence of Ti-based nanocrystals formation for nonvolatile memory applications

  作者 Feng, LW; Chang, CY; Chang, TC; Tu, CH; Wang, PS; Chang, YF; Chen, MC; Huang, HC  
  选自 期刊  Applied Physics Letters;  卷期  2009年95-26;  页码  262110-262110  
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[摘要]We investigated the physical and electrical characteristics of Ti-based nanocrystals (NCs) with composition of germanium fabricated by cosputtering titanium silicide and germanium targets for low temperature applications of nonvolatile memory. The additio

 
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