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Improved conformal coatings by oblique-angle deposition for bioreplication

  作者 Pulsifer, DP; Lakhtakia, A; Martin-Palma, RJ  
  选自 期刊  Applied Physics Letters;  卷期  2009年95-19;  页码  193701-193701  
  关联知识点  
 

[摘要]The conformal-evaporated-film-by-rotation (CEFR) technique, a bioreplication method to produce high-fidelity conformal coatings on biotemplates by oblique-angle deposition, was modified to improve the uniformity of coating thickness. The substrate holding

 
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