High-Mobility Low-Voltage ZnO and Li-Doped ZnO Transistors Based on ZrO(2) High-k Dielectric Grown by Spray Pyrolysis in Ambient Air

[摘要]：Sequential layers of the high-k dielectric ZrO(2) and the electron transporting semiconductors ZnO and Li-doped ZnO are deposited onto conductive indium tin oxide electrodes using spray pyrolysis. With these structures, thin-film transistors are fabricated with operating voltages below 6 V and maximum electron mobilities on the order of 85 cm(2) V(-1) s(-1).

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