Electrical Performance of Alumina Thin Films for High-Temperature Pressure Cells With a Metallic Body

[摘要]：Sputter deposited alumina thin films were investigated with regard to their performance as high-temperature electrical insulators. A target application of such dielectric films is in metal pressure sensor cells intended for high-temperature operation. The

[全文传递流程]：

一般上传文献全文的时限在1个工作日内